Geneva, Illinois
United States
21
2013-08-29
The entities that hold a legal rights for patent applications filed by inventor BRUSIC Vlasta:
Vlasta BRUSIC from Geneva, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for polishing aluminum/copper and titanium in damascene structures
#2 | 2011-05-05Metal-passivating CMP compositions and methods
#3 | 2009-09-24Compositions for polishing aluminum/copper and titanium in damascene structures
#4 | 2009-06-18Chemical-mechanical polishing composition and method for using the same
#5 | 2008-08-21Polishing slurry for aluminum and aluminum alloys
#6 | 2008-07-03CMP method for gold-containing substrates
#7 | 2008-06-12Compositions for polishing aluminum/copper and titanium in damascene structures
#8 | 2008-05-08CMP of copper/ruthenium/tantalum substrates
#9 | 2007-12-06Gold CMP composition and method
#10 | 2007-04-26CMP of copper/ruthenium substrates
#11 | 2007-01-11Use of CMP for aluminum mirror and solar cell fabrication
#12 | 2007-01-09CMP of noble metals
#13 | 2006-12-14Controlled electrochemical polishing method
#14 | 2006-08-29CMP method for noble metals
#15 | 2006-02-28CMP systems and methods utilizing amine-containing polymers
#16 | 2006-02-02Polishing composition for noble metals
#17 | 2005-12-01Electrochemical-mechanical polishing composition and method for using the same
#18 | 2005-09-29Chemical-mechanical polishing composition and method for using the same
#19 | 2005-08-04ECMP system
#20 | 2005-07-07Chemical-mechanical polishing of metals in an oxidized form
#21 | 2005-02-08Process for fabricating optical switches
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