Sunnyvale, California
United States
8
2008-05-22
The entities that hold a legal rights for patent applications filed by inventor Rosenstein Michael:
Michael Rosenstein from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
PHYSICAL VAPOR DEPOSITION CHAMBER HAVING AN ADJUSTABLE TARGET
#2 | 2008-05-13Motorized chamber lid
#3 | 2007-03-22Coil and coil support for generating a plasma
#4 | 2006-08-29Method and apparatus for controlling darkspace gap in a chamber
#5 | 2006-07-13Build-in LOTO device on equipment breaker panel
#6 | 2006-05-11Physical vapor deposition chamber having a rotatable substrate pedestal
#7 | 2006-05-11Physical vapor deposition chamber having an adjustable target
#8 | 2005-06-23Mechanism for varying the spacing between sputter magnetron and target
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