Eindhoven
Netherlands
7
2008-08-21
The entities that hold a legal rights for patent applications filed by inventor Tso Yin Tim:
Yin Tim Tso from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method
#2 | 2007-11-08Lithographic apparatus and device manufacturing method
#3 | 2007-10-11Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
#4 | 2007-09-20System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method
#5 | 2007-03-22Lithographic apparatus and control method
#6 | 2006-06-29Lithographic apparatus and device manufacturing method
#7 | 2005-06-16Lithographic apparatus and device manufacturing method
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