Eindhoven
Netherlands
4
2008-10-16
The entities that hold a legal rights for patent applications filed by inventor De Groot Simon:
Simon De Groot from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
#2 | 2007-11-15Method for patterning a radiation beam, patterning device for patterning a radiation beam
#3 | 2006-06-01Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus
#4 | 2006-01-12Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus
4273524 ⎘