Kai-shi
Japan
6
2008-11-06
The entities that hold a legal rights for patent applications filed by inventor Okada Mitsuhiro:
Mitsuhiro Okada from Kai-shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Film formation method and apparatus for semiconductor process
#2 | 2007-05-24Film formation apparatus and method of using the same
#3 | 2007-02-08Method and apparatus for forming silicon-containing insulating film
#4 | 2006-09-21Film formation method and apparatus for semiconductor process
#5 | 2006-03-30Method and apparatus for forming silicon nitride film
#6 | 2006-02-16Film formation method and apparatus for semiconductor process for forming a silicon nitride film
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