Chung-Sam Jun

SEMICONDUCTOR DEVICE MEASURING DEVICE AND METHOD FOR MEASURING SEMICONDUCTOR DEVICE

MULTILAYER STRUCTURE INSPECTION APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE FABRICATING METHOD USING THE INSPECTION METHOD

Method of inspecting surface and method of manufacturing semiconductor device

METHOD OF INSPECTING SURFACE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Scanning probe inspector

METHODS OF MANUFACTURING VERTICAL SEMICONDUCTOR DEVICES

SEMICONDUCTOR CHIP INSPECTION DEVICE

Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same

Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same

SEMICONDUCTOR DEVICE INSPECTION APPARATUS AND METHOD OF DRIVING THE SAME

Method of inspecting surface and method of manufacturing semiconductor device

Defect inspection method and defect inspection apparatus

Method of inspecting pattern defect

3D profiling system of semiconductor chip and method for operating the same

STRUCTURE ANALYSIS METHOD USING A SCANNING ELECTRON MICROSCOPE

Apparatus and method for exchanging probe

Apparatus for inspecting wafer

Method of inspecting wafer using electron beam

METHOD AND SYSTEM FOR DETECTING DEFECTS

Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same

Image creating method and imaging system for performing the same

Broadband light source and optical inspector having the same

APPARATUS OF INSPECTING RESISTIVE DEFECTS OF SEMICONDUCTOR DEVICES AND INSPECTING METHOD USING THE SAME

Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film

Conductive atomic force microscope and method of operating the same

Apparatus and method for inspection of substrate defect

Spectral ellipsometry measurement and data analysis device and related systems and methods

Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system

Overlay measuring method and system, and method of manufacturing semiconductor device using the same

PROCESS MANAGEMENT SYSTEMS USING COMPARISON OF STATISTICAL DATA TO PROCESS PARAMETERS AND PROCESS MANAGEMENT DEVICES

Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof

Method and apparatus to measure step height of device using scanning electron microscope

Method for inspection of defects on a substrate

Light focusing unit and spectrum measuring apparatus having the same

METHOD OF INSPECTING A SUBSTRATE

Apparatus and method for manufacturing semiconductor devices through layer material dimension analysis

Method of detecting a defect on an object

Method of analyzing a wafer sample

APPARATUS AND METHOD FOR INSPECTING A WAFER

Method of detecting defects in patterns on semiconductor substrate by comparing second image with reference image after acquiring second image from first image and apparatus for performing the same

Method of detecting defects of patterns on a semiconductor substrate and apparatus for performing the same

Method and apparatus for inspecting a wafer surface

Apparatus and method for inspecting a substrate

Apparatus for monitoring a density profile of impurities

Wafer holder and wafer conveyor equipped with the same

Apparatus and method for examining spectral characteristics of transmitted light through an object

Method of inspecgin a leakage current characteristic of a dielectric layer

Method for monitoring a density profile of impurities

Adsorption apparatus, semiconductor device manufacturing facility comprising the same, and method of recycling perfulorocompounds

Method of inspecting for defects and apparatus for performing the method

Method and apparatus for measuring thickness of metal layer

Method and apparatus for inspecting substrate pattern

Image processing method

Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method

Wafer holder and wafer conveyor system equipped with the same

Method and apparatus for detecting contaminants in ion-implanted wafer

Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process

Method and apparatus for classifying defects of an object