Eindhoven
Netherlands
3
2007-01-04
The entities that hold a legal rights for patent applications filed by inventor Harink Thijs:
Thijs Harink from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination
#2 | 2006-01-12Lithographic apparatus and a device manufacturing method
#3 | 2005-01-27Lithographic projection apparatus and device manufacturing method
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