Hidehito Saigusa

City:

Nirasaki

Country:

Japan

Published Applications:

Last publication date:

2007-06-07

Top Assignees for applications by Hidehito Saigusa

The entities that hold a legal rights for patent applications filed by inventor Saigusa Hidehito:

TOKYO ELECTRON LIMITED 10 Tokyo, Japan

Recent patent applications by Saigusa Hidehito

Hidehito Saigusa from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2007-06-07

US20070125494A1

Electricity

Method and apparatus for an improved bellows shield in a plasma processing system

#2 | 2007-05-17

US20070107846A1

Electricity

Method and apparatus for an improved baffle plate in a plasma processing system

#3 | 2007-05-10

US20070102287A1

Electricity

Method and apparatus for an improved optical window deposition shield in a plasma processing system

#4 | 2007-05-03

US20070096658A1

Electricity

Method and apparatus for an improved upper electrode plate in a plasma processing system

#5 | 2007-04-17

US10259306

Method and apparatus for an improved bellows shield in a plasma processing system

#6 | 2007-02-08

US20070028839A1

Electricity

Apparatus for an improved deposition shield in a plasma processing system

#7 | 2007-01-23

US10259757

Method and apparatus for an improved upper electrode plate in a plasma processing system

#8 | 2007-01-23

US10259380

Method and apparatus for an improved baffle plate in a plasma processing system

#9 | 2007-01-16

US10803994

Method and apparatus for an improved optical window deposition shield in a plasma processing system

#10 | 2006-11-21

US10259353

Method and apparatus for an improved deposition shield in a plasma processing system

InventorID:

4349768 ⎘