Austin, Texas
United States
4
2007-02-15
The entities that hold a legal rights for patent applications filed by inventor Toeller Michael:
Michael Toeller from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
IN-SITU ATOMIC LAYER DEPOSITION
#2 | 2005-03-17Formation of a metal-containing film by sequential gas exposure in a batch type processing system
#3 | 2005-02-03Method of forming uniform ultra-thin oxynitride layers
#4 | 2005-02-03Formation of ultra-thin oxide layers by self-limiting interfacial oxidation
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