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Inventor profile of:

Michael Halama

City:

Wetzlar

Country:

Germany

Published Applications:

1

Last publication date:

2007-02-22

Top Assignees for applications by Michael Halama

The entities that hold a legal rights for patent applications filed by inventor Halama Michael:

VISTEC Semiconductor Systems GmbH 1 Wetzlar, Germany

Recent patent applications by Halama Michael

Michael Halama from Wetzlar, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2007-02-22

US20070040241A1

Wafer inspection device

InventorID:

4359372 ⎘