Wetzlar
Germany
27
2009-09-24
11
2010-08-03
These are the the leading inventors for applications assigned to VISTEC Semiconductor Systems GmbH:
VISTEC Semiconductor Systems GmbH based in Wetzlar, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
DEVICE FOR RECORDING A NUMBER OF IMAGES OF DISK-SHAPED OBJECTS
#2 | 2008-10-23Device for Inspecting a Microscopic Component
#3 | 2008-08-28 ✅ Patent 7,768,637 granted on 2010-08-03Method for acquiring high-resolution images of defects on the upper surface of the wafer edge
#4 | 2008-03-13Method of optically inspecting and visualizing optical measuring values obtained from disk-like objects
#5 | 2007-10-25 ✅ Patent 8,154,718 granted on 2012-04-10Apparatus and method for inspecting micro-structured devices on a semiconductor substrate
#6 | 2007-09-06DEVICE FOR INSPECTING A MICROSCOPIC COMPONENT BY MEANS OF AN IMMERSION OBJECTIVE
#7 | 2007-07-12 ✅ Patent 7,561,263 granted on 2009-07-14Apparatus for illuminating and inspecting a surface
#8 | 2007-05-10APPARATUS FOR MEASURING THE POSITION OF AN OBJECT WITH A LASER INTERFEROMETER SYSTEM
#9 | 2007-05-10SUBSTRATE SUPPORT APPARATUS FOR USE IN A POSITION MEASURING DEVICE
#10 | 2007-04-05Device for handling disk-like objects
#11 | 2007-04-05 ✅ Patent 7,477,370 granted on 2009-01-13Method of detecting incomplete edge bead removal from a disk-like object
#12 | 2007-03-08 ✅ Patent 7,545,489 granted on 2009-06-09Apparatus and method of inspecting the surface of a wafer
#13 | 2007-03-01Coordinate measuring device
#14 | 2007-02-22 ✅ Patent 7,424,393 granted on 2008-09-09Wafer inspection device
#15 | 2007-02-15Apparatus and method of illuminating the surface of a wafer in a wafer inspection system
#16 | 2007-02-08 ✅ Patent 7,416,819 granted on 2008-08-26Test mask for optical and electron optical systems
#17 | 2007-01-18Apparatus for Inspecting a Wafer
#18 | 2006-12-21Method of optically imaging and inspecting a wafer in the context of edge bead removal
#19 | 2006-12-14 ✅ Patent 7,450,246 granted on 2008-11-11Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction
#20 | 2006-12-14Method of inspecting semiconductor wafers taking the SAW design into account
#21 | 2006-12-07Apparatus and method for optically detecting an object
#22 | 2006-12-07Apparatus and method for improving measuring accuracy in the determination of structural data
#23 | 2006-11-23Apparatus and method for inspecting a wafer
#24 | 2006-11-02 ✅ Patent 7,489,394 granted on 2009-02-10Apparatus for inspecting a disk-like object
#25 | 2006-10-26Transportation system for a disk-like object and system for inspecting disk-like object
#26 | 2006-10-26 ✅ Patent 7,382,450 granted on 2008-06-03Method of detecting an edge bead removal line on a wafer
#27 | 2005-01-06 ✅ Patent 7,224,446 granted on 2007-05-29Apparatus, method, and computer program for wafer inspection
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