Mountain View, California
United States
5
2008-05-20
The entities that hold a legal rights for patent applications filed by inventor Kawaguchi Mark N.:
Mark N. Kawaguchi from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for removing a halogen-containing residue
#2 | 2007-11-29APPARATUS FOR REMOVING A HALOGEN-CONTAINING RESIDUE
#3 | 2007-11-01Method for removing a halogen-containing residue
#4 | 2007-03-08Methods and apparatus for stripping
#5 | 2006-12-28Method and apparatus for performing hydrogen optical emission endpoint detection for photoresist strip and residue removal
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