Dresden
Germany
3
2007-12-13
The entities that hold a legal rights for patent applications filed by inventor Mulders Thomas:
Thomas Mulders from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mask arrangement, optical projection system and method for obtaining grating parameters and absorption properties of a diffractive optical element
#2 | 2007-09-13Method for determining an edge profile of a volume of a photoresist after a development process
#3 | 2007-03-15Method for compensating film height modulations in spin coating of a resist film layer
4374698 ⎘