Santa Clara, California
United States
6
2007-06-12
The entities that hold a legal rights for patent applications filed by inventor Johnson Kenneth:
Kenneth Johnson from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Diffracting, aperiodic targets for overlay metrology and method to detect gross overlay
#2 | 2007-04-12Overlay metrology method and apparatus using more than one grating per measurement direction
#3 | 2006-08-22Method and apparatus for position-dependent optical metrology calibration
#4 | 2006-07-27Method and apparatus for position-dependent optical metrology calibration
#5 | 2006-07-06Method and apparatus for position-dependent optical metrology calibration
#6 | 2005-06-09Overlay metrology method and apparatus using more than one grating per measurement direction
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