Asten
Netherlands
6
2007-09-20
The entities that hold a legal rights for patent applications filed by inventor Jacobs Fransicus Mathijs:
Fransicus Mathijs Jacobs from Asten, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method
#2 | 2007-08-16Lithographic apparatus and stage apparatus
#3 | 2007-08-16Lithographic apparatus and device manufacturing method
#4 | 2007-08-02Lithographic apparatus and device manufacturing method for clamping a patterning device
#5 | 2007-05-24Apparatus for cooling
#6 | 2007-05-17Lithographic apparatus and motor
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