Franklin, Massachusetts
United States
5
2007-05-24
The entities that hold a legal rights for patent applications filed by inventor Hollerbach Uwe:
Uwe Hollerbach from Franklin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of two dimensional feature model calibration and optimization
#2 | 2007-02-13Method of two dimensional feature model calibration and optimization
#3 | 2006-11-09Apparatus, method and computer program product for performing a model based optical proximity correction factoring neighbor influence
#4 | 2006-01-12Apparatus, method and program product for suppressing waviness of features to be printed using photolithographic systems
#5 | 2005-03-10Method, program product and apparatus for generating assist features utilizing an image field map
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