Eindhoven
Netherlands
7
2007-08-09
The entities that hold a legal rights for patent applications filed by inventor Hauschild Jan:
Jan Hauschild from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus, calibration method, device manufacturing method and computer program product
#2 | 2006-12-21Lithographic apparatus and device manufacturing method
#3 | 2006-12-14Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly
#4 | 2006-07-06Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly
#5 | 2006-06-29Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly
#6 | 2006-06-29Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
#7 | 2006-06-22Lithographic apparatus focus test method and system, and device manufacturing method
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