Dresden
Germany
3
2007-09-27
The entities that hold a legal rights for patent applications filed by inventor Schneider Karsten:
Karsten Schneider from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods for etching a bottom anti-reflective coating layer in dual damascene application
#2 | 2007-09-27METHODS FOR ETCHING A BOTTOM ANTI-REFLECTIVE COATING LAYER IN DUAL DAMASCENE APPLICATION
#3 | 2007-09-27Methods for etching a dielectric barrier layer with high selectivity
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