Suwon
South Korea
6
2007-10-04
The entities that hold a legal rights for patent applications filed by inventor Boo Jae-Phil:
Jae-Phil Boo from Suwon, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR POLISHING A SEMICONDUCTOR WAFER
#2 | 2007-03-27Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same
#3 | 2006-06-01Method for polishing a semiconductor wafer
#4 | 2005-07-14Polishing head of chemical mechanical polishing apparatus and polishing method using the same
#5 | 2005-06-23Apparatus for polishing a semiconductor wafer
#6 | 2005-04-19Polishing head of chemical mechanical polishing apparatus and polishing method using the same
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