Meihua Shen

City:

Country:

United States

Published Applications:

Last publication date:

2007-10-25

Top Assignees for applications by Meihua Shen

The entities that hold a legal rights for patent applications filed by inventor Shen Meihua:

Meihua Shen from , US has applied for patents for these inventions. The list has both pending applications and granted patents:

Etching high K dielectrics with high selectivity to oxide containing layers at elevated temperatures with BC13 based etch chemistries

InventorID:

4510231 ⎘