Dresden
Germany
2
2006-02-02
The entities that hold a legal rights for patent applications filed by inventor Teipel Ansgar:
Ansgar Teipel from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for correcting structure-size-dependent positioning errors in photolithography
#2 | 2005-03-31Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer
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