Eindhoven
Netherlands
2
2006-03-23
The entities that hold a legal rights for patent applications filed by inventor Kivits Koen:
Koen Kivits from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
#2 | 2006-03-16Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program
4591866 ⎘