Stefan Bangert

PROCESSING APPARATUS FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHODS THEREFOR

MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A SUBSTRATE, AND MATERIAL DEPOSITION SYSTEM

TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ONTO A SUBSTRATE

Evaporation apparatus, vapor deposition apparatus, and evaporation method

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF MEASURING AT LEAST ONE OF A PROPERTY OF A FLEXIBLE SUBSTRATE AND A PROPERTY OF ONE OR MORE COATINGS ON THE FLEXIBLE SUBSTRATE

LASER PROCESSING OF LITHIUM BATTERY WEB

Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller

ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APPARATUS, AND METHODS THEREFOR

Material deposition apparatus, method of depositing material on a substrate, and material deposition system

Flanged joint and method of fluidly connecting two components

EVAPORATION APPARATUS, VAPOR DEPOSITION APPARATUS, AND EVAPORATION METHOD

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF MEASURING AT LEAST ONE OF A PROPERTY OF A FLEXIBLE SUBSTRATE AND A PROPERTY OF ONE OR MORE COATINGS ON THE FLEXIBLE SUBSTRATE

Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate

EVAPORATION SOURCE, VAPOR DEPOSITION APPARATUS, AND METHOD FOR COATING A SUBSTRATE IN A VACUUM CHAMBER

Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate

VAPOR DEPOSITION APPARATUS AND METHOD FOR COATING A SUBSTRATE IN A VACUUM CHAMBER

Vapor deposition apparatus and method for coating a substrate in a vacuum chamber

VACUUM PROCESSING SYSTEM AND METHOD OF OPERATING A VACUUM PROCESSING SYSTEM

APPARATUS AND VACUUM SYSTEM FOR CARRIER ALIGNMENT IN A VACUUM CHAMBER, AND METHOD OF ALIGNING A CARRIER

EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL

DEPOSITION SYSTEM, DEPOSITION APPARATUS, AND METHOD OF OPERATING A DEPOSITION SYSTEM

APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR TRANSPORTATION OF A SUBSTRATE CARRIER AND A MASK CARRIER IN A VACUUM CHAMBER

APPARATUS FOR ROUTING A CARRIER IN A PROCESSING SYSTEM, A SYSTEM FOR PROCESSING A SUBSTRATE ON THE CARRIER, AND METHOD OF ROUTING A CARRIER IN A VACUUM CHAMBER

POSITIONING ARRANGEMENT FOR A SUBSTRATE CARRIER AND A MASK CARRIER, TRANSPORTATION SYSTEM FOR A SUBSTRATE CARRIER AND A MASK CARRIER, AND METHODS THEREFOR

MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHOD THEREFOR

Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber

APPARATUS AND METHOD FOR TRANSPORTATION OF A DEPOSITION SOURCE

Methods of operating a deposition apparatus, and deposition apparatus

Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof

A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER

EVAPORATION SOURCE

MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THEREFORE

CARRIER FOR SUPPORTING AT LEAST ONE SUBSTRATE DURING A SPUTTER DEPOSITION PROCESS, APPARATUS FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE, AND METHOD FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE

Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier

EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL

MASK ARRANGEMENT FOR MASKING A SUBSTRATE IN A PROCESSING CHAMBER

MATERIAL SOURCE ARRANGMENT AND NOZZLE FOR VACUUM DEPOSITION

System for depositing one or more layers on a substrate supported by a carrier and method using the same

EVAPORATION SOURCE FOR ORGANIC MATERIAL

EVAPORATION SOURCE FOR ORGANIC MATERIAL

A PROCESSING APPARATUS FOR PROCESSING DEVICES, PARTICULARLY DEVICES INCLUDING ORGANIC MATERIALS THEREIN, AND METHOD FOR TRANSFERRING AN EVAPORATION SOURCE FROM A PROCESSING VACUUM CHAMBER TO A MAINTENANCE VACUUM CHAMBER OR FROM THE MAINTENANCE VACUUM CHAMBER TO THE PROCESSING VACUUM CHAMBER

DEPOSITING ARRANGEMENT, DEPOSITION APPARATUS AND METHODS OF OPERATION THEREOF

EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL

Methods for plasma activation of evaporated precursors in a process chamber

SUBSTRATE CARRIER FOR A REDUCED TRANSMISSION OF THERMAL ENERGY

Sputter deposition source, apparatus for sputter deposition and method of assembling thereof

Shadow mask alignment and management system

EVAPORATOR, DEPOSITION ARRANGEMENT, DEPOSITION APPARATUS AND METHODS OF OPERATION THEREOF

PLASMA ENHANCED DEPOSITION ARRANGEMENT FOR EVAPORATION OF DIELECTRIC MATERIALS, DEPOSITION APPARATUS AND METHODS OF OPERATING THEREOF

LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING

Plasma enhanced thermal evaporator

APPARATUS AND METHOD FOR COATING USING A HOT WIRE

Methods of and factories for thin-film battery manufacturing

Methods of and hybrid factories for thin-film battery manufacturing

Alkali Metal Deposition System

LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING

MASK HOLDING DEVICE

Magnetic holding device and method for holding a substrate

Mask support, mask assembly, and assembly comprising a mask support and a mask

Shadow mask alignment and management system

Methods of and factories for thin-film battery manufacturing

PLASMA ENHANCED THERMAL EVAPORATOR

EVAPORATOR, COATING INSTALLATION, AND METHOD FOR USE THEREOF

EVAPORATION SOURCE WITH EXCHANGEABLE NOZZLES

Arrangement and method for removing alkali- or alkaline earth-metals from a vacuum coating chamber

ARRANGEMENT FOR COATING A SUBSTRATE

MASK SUPPORT, MASK ASSEMBLY, AND ASSEMBLY COMPRISING A MASK SUPPORT AND A MASK

COATING APPARATUS WITH ROTATION MODULE

Coating apparatus with rotation module

EVAPORATION APPARATUS WITH INCLINED CRUCIBLE

COATING PLANT WITH A CHARGING LOCK AND DEVICE THEREFOR

Method for operating a sputter cathode with a target

Coating plant with a charging lock and device therefor

Vacuum closure with linear drive unit

Drive mechanism for a vacuum treatment apparatus

Coater with a large-area assembly of rotatable magnetrons

Arrangement for transporting a flat substrate in a vacuum chamber

Vacuum treatment installation for flat rectangular or square substrates

Electrode arrangement

Cathodic sputtering apparatus