Los Altos, California
United States
5
2007-08-28
The entities that hold a legal rights for patent applications filed by inventor Sung Junghwan:
Junghwan Sung from Los Altos, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of forming low-resistivity tungsten interconnects
#2 | 2006-05-04Deposition of tungsten nitride
#3 | 2006-02-28Deposition of tungsten nitride
#4 | 2005-04-21Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus
#5 | 2005-02-10Method for reducing tungsten film roughness and improving step coverage
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