Nirasaki-shi
Japan
11
2014-09-11
The entities that hold a legal rights for patent applications filed by inventor Ohno Hiroki:
Hiroki Ohno from Nirasaki-shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Supercritical drying method for semiconductor substrate and supercritical drying apparatus
#2 | 2014-01-23Substrate processing method and storage medium
#3 | 2013-01-24Supercritical drying method for semiconductor substrate and supercritical drying apparatus
#4 | 2012-12-06Substrate processing method, substrate processing apparatus, and storage medium
#5 | 2012-10-04Supercritical drying method and apparatus for semiconductor substrates
#6 | 2010-12-09Substrate processing method and substrate processing apparatus
#7 | 2008-06-05Substrate processing apparatus and substrate processing method
#8 | 2008-02-21Substrate cleaning method and computer readable storage medium
#9 | 2007-06-07Substrate cleaning method and substrate cleaning apparatus
#10 | 2007-01-25Substrate processing method and substrate processing apparatus
#11 | 2005-02-03Film forming method and film forming apparatus
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