Sumio Yabe

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2006-10-19

Top Assignees for applications by Sumio Yabe

The entities that hold a legal rights for patent applications filed by inventor Yabe Sumio:

Sumio Yabe from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus, substrate processing method, and substrate holding apparatus

InventorID:

4719211 ⎘