Andover, Massachusetts
United States
3
2006-12-21
The entities that hold a legal rights for patent applications filed by inventor Shydo Robert:
Robert Shydo from Andover, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for treating substrates and films with photoexcitation
#2 | 2006-12-21Method for silicon based dielectric deposition and clean with photoexcitation
#3 | 2006-12-14Rotating substrate support and methods of use
4749326 ⎘