Dresden
Germany
3
2005-03-31
The entities that hold a legal rights for patent applications filed by inventor Gruss Stefan:
Stefan Gruss from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for reducing an overlay error and measurement mark for carrying out the same
#2 | 2005-03-31Method for detecting positioning errors of circuit patterns during the transfer by means of a mask into layers of a substrate of a semiconductor wafer
#3 | 2005-01-06Method for fabricating a contact hole plane in a memory module
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