Evans Y. Lee

City:

Milpitas, California

Country:

United States

Published Applications:

Last publication date:

2008-05-20

Top Assignees for applications by Evans Y. Lee

The entities that hold a legal rights for patent applications filed by inventor Lee Evans Y.:

Evans Y. Lee from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor

Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber

Double slit-valve doors for plasma processing

Temperature controlled window with a fluid supply system

Magnetic barrier for plasma in chamber exhaust

Dielectric etch chamber with expanded process window

InventorID:

4761220 ⎘