Menlo Park, California
United States
3
2007-03-13
The entities that hold a legal rights for patent applications filed by inventor Babcoke Jason E.:
Jason E. Babcoke from Menlo Park, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Varying conductance out of a process region to control gas flux in an ALD reactor
#2 | 2005-03-10Variable gas conductance control for a process chamber
#3 | 2005-01-27Substrate temperature control in an ALD reactor
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