Dresden
Germany
14
2013-10-10
The entities that hold a legal rights for patent applications filed by inventor Schmidt Sebastian:
Sebastian Schmidt from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Structure and method for placement, sizing and shaping of dummy structures
#2 | 2011-06-09Structure and Method for Placement, Sizing and Shaping of Dummy Structures
#3 | 2010-12-23Transmission mask with differential attenuation to improve ISO-dense proximity
#4 | 2009-05-14Structure and method for placement, sizing and shaping of dummy structures
#5 | 2006-09-28Structure and method for placement, sizing and shaping of dummy structures
#6 | 2006-05-30Transmission mask with differential attenuation to improve ISO-dense proximity
#7 | 2006-05-04Transmission mask with differential attenuation to improve ISO-dense proximity
#8 | 2006-04-20Exposure device for immersion lithography and method for monitoring parameters of an exposure device for immersion lithography
#9 | 2005-12-27Method for measuring a characteristic dimension of at least one pattern on a disc-shaped object in a measuring instrument
#10 | 2005-12-27Method for exposing at least one or at least two semiconductor wafers
#11 | 2005-12-08Method for purging an optical lens
#12 | 2005-06-21Method for performing an alignment measurement of two patterns in different layers on a semiconductor wafer
#13 | 2005-05-10Method for adjusting processing parameters of at least one plate-shaped object in a processing tool
#14 | 2005-03-24Structure and method for placement, sizing and shaping of dummy structures
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