Los Altos, California
United States
8
2014-10-16
The entities that hold a legal rights for patent applications filed by inventor Alles David:
David Alles from Los Altos, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Inspecting high-resolution photolithography masks
#2 | 2014-08-07Spectral purity filter and light monitor for an EUV reticle inspection system
#3 | 2013-10-17Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool
#4 | 2011-04-19Beam conditioning to reduce spatial coherence
#5 | 2008-12-11Methods for detecting and classifying defects on a reticle
#6 | 2008-05-27Methods and systems for reticle inspection and defect review using aerial imaging
#7 | 2006-10-17Methods and systems for inspecting reticles using aerial imaging and die-to-database detection
#8 | 2006-04-11Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths
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