Milpitas, California
United States
173
2020-03-05
172
2022-05-31
These are the the leading inventors for applications assigned to KLA-TENCOR TECHNOLOGIES CORP.:
KLA-TENCOR TECHNOLOGIES CORP. based in Milpitas, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Methods and systems for inspection of wafers and reticles using designer intent data
#2 | 2018-08-30 ✅ Patent 10,713,771 granted on 2020-07-14Methods and systems for inspection of wafers and reticles using designer intent data
#3 | 2015-11-17 ✅ Patent 9,188,974 granted on 2015-11-17Methods for improved monitor and control of lithography processes
#4 | 2015-06-30 ✅ Patent 9,068,917 granted on 2015-06-30Systems and methods for inspection of a specimen
#5 | 2015-06-04 ✅ Patent 9,401,014 granted on 2016-07-26Methods and systems for utilizing design data in combination with inspection data
#6 | 2013-11-12 ✅ Patent 8,582,094 granted on 2013-11-12Systems and methods for inspecting specimens including specimens that have a substantially rough uppermost layer
#7 | 2013-02-14 ✅ Patent 8,502,979 granted on 2013-08-06Methods and systems for determining a critical dimension and overlay of a specimen
#8 | 2013-02-07 ✅ Patent 8,422,010 granted on 2013-04-16Methods and systems for determining a characteristic of a wafer
#9 | 2012-04-03 ✅ Patent 8,148,900 granted on 2012-04-03Methods and systems for providing illumination of a specimen for inspection
#10 | 2012-03-13 ✅ Patent 8,135,204 granted on 2012-03-13Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe
#11 | 2011-12-22 ✅ Patent 8,831,767 granted on 2014-09-09Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
#12 | 2011-11-24 ✅ Patent 8,139,843 granted on 2012-03-20Methods and systems for utilizing design data in combination with inspection data
#13 | 2011-10-25 ✅ Patent 8,045,145 granted on 2011-10-25Systems and methods for acquiring information about a defect on a specimen
#14 | 2011-08-16 ✅ Patent 8,000,905 granted on 2011-08-16Computer-implemented methods, carrier media, and systems for determining sizes of defects detected on a wafer
#15 | 2011-07-28 ✅ Patent 8,355,140 granted on 2013-01-15Systems configured to generate output corresponding to defects on a specimen
#16 | 2011-06-28 ✅ Patent 7,968,354 granted on 2011-06-28Methods for correlating backside and frontside defects detected on a specimen and classification of backside defects
#17 | 2011-06-16 ✅ Patent 8,213,705 granted on 2012-07-03Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer
#18 | 2011-01-18 ✅ Patent 7,873,504 granted on 2011-01-18Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout
#19 | 2011-01-11 ✅ Patent 7,869,040 granted on 2011-01-11Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
#20 | 2011-01-11 ✅ Patent 7,869,020 granted on 2011-01-11Fourier filters, inspection systems, and systems for fabricating fourier filters
#21 | 2011-01-11 ✅ Patent 7,867,693 granted on 2011-01-11Methods for forming device structures on a wafer
#22 | 2010-10-28 ✅ Patent 8,179,530 granted on 2012-05-15Methods and systems for determining a critical dimension and overlay of a specimen
#23 | 2010-09-23 ✅ Patent 8,384,887 granted on 2013-02-26Methods and systems for inspection of a specimen using different inspection parameters
#24 | 2010-09-09 ✅ Patent 8,111,900 granted on 2012-02-07Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle
#25 | 2010-07-06 ✅ Patent 7,751,046 granted on 2010-07-06Methods and systems for determining a critical dimension and overlay of a specimen
#26 | 2010-05-18 ✅ Patent 7,719,294 granted on 2010-05-18Systems configured to perform a non-contact method for determining a property of a specimen
#27 | 2010-05-04 ✅ Patent 7,711,521 granted on 2010-05-04Methods and systems for detection of selected defects particularly in relatively noisy inspection data
#28 | 2010-04-27 ✅ Patent 7,705,331 granted on 2010-04-27Methods and systems for providing illumination of a specimen for a process performed on the specimen
#29 | 2010-02-09 ✅ Patent 7,659,975 granted on 2010-02-09Methods and systems for inspection of a wafer or setting up an inspection process
#30 | 2009-12-03 ✅ Patent 8,923,600 granted on 2014-12-30Methods and systems for utilizing design data in combination with inspection data
#31 | 2009-11-12 ✅ Patent 7,764,376 granted on 2010-07-27Systems and methods for measurement of a specimen with vacuum ultraviolet light
#32 | 2009-10-27 ✅ Patent 7,608,468 granted on 2009-10-27Apparatus and methods for determining overlay and uses of same
#33 | 2009-08-04 ✅ Patent 7,570,797 granted on 2009-08-04Methods and systems for generating an inspection process for an inspection system
#34 | 2009-07-28 ✅ Patent 7,566,517 granted on 2009-07-28Feature printability optimization by optical tool
#35 | 2009-04-16 ✅ Patent 7,671,982 granted on 2010-03-02Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system
#36 | 2009-03-26 ✅ Patent 7,767,956 granted on 2010-08-03Methods and systems for lithography process control
#37 | 2009-03-05 ✅ Patent 7,782,452 granted on 2010-08-24Systems and method for simultaneously inspecting a specimen with two distinct channels
#38 | 2009-02-12 ✅ Patent 7,711,514 granted on 2010-05-04Computer-implemented methods, carrier media, and systems for generating a metrology sampling plan
#39 | 2009-02-12 ✅ Patent 7,746,459 granted on 2010-06-29Systems configured to inspect a wafer
#40 | 2009-02-12 ✅ Patent 7,777,875 granted on 2010-08-17Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation
#41 | 2009-02-05 ✅ Patent 8,611,639 granted on 2013-12-17Semiconductor device property extraction, generation, visualization, and monitoring methods
#42 | 2009-01-27 ✅ Patent 7,483,146 granted on 2009-01-27Systems configured to provide illumination of a specimen or to inspect a specimen
#43 | 2009-01-08 ✅ Patent 7,697,129 granted on 2010-04-13Systems and methods for inspecting a wafer with increased sensitivity
#44 | 2008-12-11 ✅ Patent 7,474,967 granted on 2009-01-06Computer-implemented methods, carrier media, and systems for detecting defects on a wafer based on multi-core architecture
#45 | 2008-12-11 ✅ Patent 7,787,114 granted on 2010-08-31Systems and methods for inspecting a specimen with light at varying power levels
#46 | 2008-12-09 ✅ Patent 7,463,349 granted on 2008-12-09Systems and methods for determining a characteristic of a specimen
#47 | 2008-11-27 ✅ Patent 7,746,462 granted on 2010-06-29Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range
#48 | 2008-10-30 ✅ Patent 8,765,496 granted on 2014-07-01Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis
#49 | 2008-10-16 ✅ Patent 7,623,239 granted on 2009-11-24Systems and methods for measurement of a specimen with vacuum ultraviolet light
#50 | 2008-10-14 ✅ Patent 7,436,503 granted on 2008-10-14Dark field inspection apparatus and methods
#51 | 2008-10-07 ✅ Patent 7,430,898 granted on 2008-10-07Methods and systems for analyzing a specimen using atomic force microscopy profiling in combination with an optical technique
#52 | 2008-09-18 ✅ Patent 7,564,545 granted on 2009-07-21Inspection methods and systems for lithographic masks
#53 | 2008-09-11 ✅ Patent 7,925,072 granted on 2011-04-12Methods for identifying array areas in dies formed on a wafer and methods for setting up such methods
#54 | 2008-08-28 ✅ Patent 8,010,222 granted on 2011-08-30Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
#55 | 2008-08-28 ✅ Patent 7,894,659 granted on 2011-02-22Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a wafer
#56 | 2008-08-26 ✅ Patent 7,417,724 granted on 2008-08-26Wafer inspection systems and methods for analyzing inspection data
#57 | 2008-08-26 ✅ Patent 7,418,124 granted on 2008-08-26Qualifying patterns, patterning processes, or patterning apparatus in the fabrication of microlithographic patterns
#58 | 2008-08-05 ✅ Patent 7,408,641 granted on 2008-08-05Measurement systems configured to perform measurements of a specimen and illumination subsystems configured to provide illumination for a measurement system
#59 | 2008-07-08 ✅ Patent 7,397,254 granted on 2008-07-08Methods for imperfect insulating film electrical thickness/capacitance measurement
#60 | 2008-07-08 ✅ Patent 7,396,022 granted on 2008-07-08System and method for optimizing wafer flatness at high rotational speeds
#61 | 2008-07-01 ✅ Patent 7,394,067 granted on 2008-07-01Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems
#62 | 2008-06-10 ✅ Patent 7,385,688 granted on 2008-06-10Multi-spot illumination and collection optics for highly tilted wafer planes
#63 | 2008-06-05 ✅ Patent 7,728,969 granted on 2010-06-01Methods and systems for identifying defect types on a wafer
#64 | 2008-05-27 ✅ Patent 7,379,183 granted on 2008-05-27Apparatus and methods for detecting overlay errors using scatterometry
#65 | 2008-05-27 ✅ Patent 7,379,175 granted on 2008-05-27Methods and systems for reticle inspection and defect review using aerial imaging
#66 | 2008-05-13 ✅ Patent 7,373,277 granted on 2008-05-13Methods and systems for detection of selected defects particularly in relatively noisy inspection data
#67 | 2008-05-08 ✅ Patent 7,580,124 granted on 2009-08-25Dual stage defect region identification and defect detection method and apparatus
#68 | 2008-05-06 ✅ Patent 7,368,208 granted on 2008-05-06Measuring phase errors on phase shift masks
#69 | 2008-04-24 ✅ Patent 8,045,786 granted on 2011-10-25Waferless recipe optimization
#70 | 2008-04-15 ✅ Patent 7,358,748 granted on 2008-04-15Methods and systems for determining a property of an insulating film
#71 | 2008-04-08 ✅ Patent 7,355,709 granted on 2008-04-08Methods and systems for optical and non-optical measurements of a substrate
#72 | 2008-04-01 ✅ Patent 7,352,456 granted on 2008-04-01Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimes
#73 | 2008-03-25 ✅ Patent 7,349,090 granted on 2008-03-25Methods and systems for determining a property of a specimen prior to, during, or subsequent to lithography
#74 | 2008-03-20 ✅ Patent 8,102,408 granted on 2012-01-24Computer-implemented methods and systems for determining different process windows for a wafer printing process for different reticle designs
#75 | 2008-03-18 ✅ Patent 7,345,754 granted on 2008-03-18Fourier filters and wafer inspection systems
#76 | 2008-03-18 ✅ Patent 7,345,752 granted on 2008-03-18Multi-spot illumination and collection optics for highly tilted wafer planes
#77 | 2008-02-28 ✅ Patent 7,564,557 granted on 2009-07-21Apparatus and methods for detecting overlay errors using scatterometry
#78 | 2008-02-07 ✅ Patent 7,747,062 granted on 2010-06-29Methods, defect review tools, and systems for locating a defect in a defect review process
#79 | 2008-01-31 ✅ Patent 7,433,040 granted on 2008-10-07Apparatus and methods for detecting overlay errors using scatterometry
#80 | 2008-01-17 ✅ Patent 8,284,394 granted on 2012-10-09Methods and systems for determining a characteristic of a wafer
#81 | 2007-12-13 ✅ Patent 7,570,796 granted on 2009-08-04Methods and systems for utilizing design data in combination with inspection data
#82 | 2007-12-13 ✅ Patent 7,711,177 granted on 2010-05-04Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data
#83 | 2007-12-04 ✅ Patent 7,304,302 granted on 2007-12-04Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis
#84 | 2007-12-04 ✅ Patent 7,304,310 granted on 2007-12-04Methods and systems for inspecting a specimen using light scattered in different wavelength ranges
#85 | 2007-11-29 ✅ Patent 7,925,486 granted on 2011-04-12Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout
#86 | 2007-10-04 ✅ Patent 8,041,103 granted on 2011-10-18Methods and systems for determining a position of inspection data in design data space
#87 | 2007-10-04 ✅ Patent 7,463,369 granted on 2008-12-09Systems and methods for measuring one or more characteristics of patterned features on a specimen
#88 | 2007-10-04 ✅ Patent 7,436,505 granted on 2008-10-14Computer-implemented methods and systems for determining a configuration for a light scattering inspection system
#89 | 2007-09-25 ✅ Patent 7,274,440 granted on 2007-09-25Systems and methods for measuring stress in a specimen
#90 | 2007-07-26 ✅ Patent 7,502,177 granted on 2009-03-10Broad band DUV, VUV long-working distance catadioptric imaging system
#91 | 2007-07-24 ✅ Patent 7,248,062 granted on 2007-07-24Contactless charge measurement of product wafers and control of corona generation and deposition
#92 | 2007-07-05 ✅ Patent 7,676,077 granted on 2010-03-09Methods and systems for utilizing design data in combination with inspection data
#93 | 2007-06-26 ✅ Patent 7,236,847 granted on 2007-06-26Systems and methods for closed loop defect reduction
#94 | 2007-06-14 ✅ Patent 7,570,800 granted on 2009-08-04Methods and systems for binning defects detected on a specimen
#95 | 2007-06-14 ✅ Patent 7,372,559 granted on 2008-05-13Systems and methods for inspecting a wafer with increased sensitivity
#96 | 2007-06-05 ✅ Patent 7,227,628 granted on 2007-06-05Wafer inspection systems and methods for analyzing inspection data
#97 | 2007-05-17Test Pads, Methods and Systems for Measuring Properties of a Wafer
#98 | 2007-04-12 ✅ Patent 7,554,656 granted on 2009-06-30Methods and systems for inspection of a wafer
#99 | 2007-03-29 ✅ Patent 7,893,703 granted on 2011-02-22Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer
#100 | 2007-03-27 ✅ Patent 7,196,782 granted on 2007-03-27Methods and systems for determining a thin film characteristic and an electrical property of a specimen
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