Paul E. Schilling

City:

Granite Bay, California

Country:

United States

Published Applications:

Last publication date:

2007-04-24

Top Assignees for applications by Paul E. Schilling

The entities that hold a legal rights for patent applications filed by inventor Schilling Paul E.:

TOKYO ELECTRON LIMITED 2 Tokyo, Japan

Recent patent applications by Schilling Paul E.

Paul E. Schilling from Granite Bay, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2007-04-24

US10870871

Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module

#2 | 2005-10-13

US20050227187A1

Electricity

Ionic fluid in supercritical fluid for semiconductor processing

#3 | 2005-05-10

US9841800

Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module

InventorID:

4927456 ⎘