SUNNYVALE, California
United States
9
2024-10-31
The entities that hold a legal rights for patent applications filed by inventor TAE PATRICK:
PATRICK TAE from SUNNYVALE, US has applied for patents for these inventions. The list has both pending applications and granted patents:
TRANSMISSION CORRECTED PLASMA EMISSION USING IN-SITU OPTICAL REFLECTOMETRY
#2 | 2024-08-29THIN FILM, IN-SITU MEASUREMENT THROUGH TRANSPARENT CRYSTAL AND TRANSPARENT SUBSTRATE WITHIN PROCESSING CHAMBER WALL
#3 | 2024-01-04Differential capacitive sensor for in-situ film thickness and dielectric constant measurement
#4 | 2023-09-28Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner
#5 | 2023-09-21PROCESS CHARACTERIZATION AND CORRECTION USING OPTICAL WALL PROCESS SENSOR (OWPS)
#6 | 2023-03-16Transmission corrected plasma emission using in-situ optical reflectometry
#7 | 2021-12-16Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall
#8 | 2021-12-16Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner
#9 | 2021-02-04Differential capacitive sensors for in-situ film thickness and dielectric constant measurement
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