Eindhoven
Netherlands
4
2024-05-16
The entities that hold a legal rights for patent applications filed by inventor Liu Fei:
Fei Liu from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
#2 | 2023-09-28METHODS AND PATTERNING DEVICES AND APPARATUSES FOR MEASURING FOCUS PERFORMANCE OF A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD
#3 | 2022-09-15Prolonging optical element lifetime in an EUV lithography system
#4 | 2021-04-15Prolonging optical element lifetime in an EUV lithography system
5052714 ⎘