Radeberg
Germany
6
2016-07-07
The entities that hold a legal rights for patent applications filed by inventor Brencher Lothar:
Lothar Brencher from Radeberg, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Device and Method for Stopping an Etching Process
#2 | 2016-03-31Method for processing a carrier, a method for operating a plasma processing chamber, and a method for processing a semiconductor wafer
#3 | 2014-04-24Method for removing a dielectric layer from a bottom of a trench
#4 | 2013-10-31Device and method for stopping etching process
#5 | 2009-05-14Device and method for stopping an etching process
#6 | 2005-08-18Method for structuring metal by means of a carbon mask
508804 ⎘