Mühltal
Germany
5
2025-07-31
The entities that hold a legal rights for patent applications filed by inventor AUST Henning:
Henning AUST from Mühltal, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
MAGNETIC LEVITATION SYSTEM FOR SUBSTRATE SUPPORT DEVICE
#2 | 2022-12-08MAGNETIC LEVITATION SYSTEM, PROCESSING SYSTEM, AND METHOD OF TRANSPORTING A CARRIER
#3 | 2022-06-30Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier
#4 | 2021-11-18Magnetic levitation system, base of a magnetic levitation system, vacuum system, and method of contactlessly holding and moving a carrier in a vacuum chamber
#5 | 2021-07-22Apparatus and method for contactless transportation of a device in a vacuum processing system
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