Phoenix, Arizona
United States
19
2026-05-28
The entities that hold a legal rights for patent applications filed by inventor Lu Yanfu:
Yanfu Lu from Phoenix, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING PROCESS MODULES AND GAS DELIVERY ASSEMBLIES CONFIGURED FOR PERFORMING CONCURRENT EPITAXIAL DEPOSITION OF MATERIAL LAYERS
#2 | 2026-05-28PROCESS MODULES CONFIGURED FOR PERFORMING CONCURRENT EPITAXIAL DEPOSITION OF MATERIAL LAYERS AND SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING SUCH PROCESS MODULES
#3 | 2026-03-19DUAL PYROMETER SYSTEMS FOR SUBSTRATE TEMPERATURE CONTROL DURING FILM DEPOSITION
#4 | 2026-01-01CHAMBER ARRANGEMENTS WITH OFFSET UPPER REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS, AND RELATED METHODS OF MAKING CHAMBER ARRANGEMENTS AND DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES
#5 | 2025-08-28METHOD OF FORMING SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR STRUCTURE, AND SEMICONDUCTOR PROCESSING SYSTEM
#6 | 2025-06-05CHAMBER ARRANGEMENTS WITH UPPER AND LOWER PYROMETERS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING CHAMBER ARRANGEMENTS, AND MATERIAL LAYER DEPOSITION METHODS
#7 | 2025-02-13FILM DEPOSITION SYSTEMS AND METHODS
#8 | 2024-10-03METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRECURSORS
#9 | 2024-10-03PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM
#10 | 2024-06-27METHODS OF FORMING STRUCTURES, SEMICONDUCTOR PROCESSING SYSTEMS, AND SEMICONDUCTOR DEVICE STRUCTURES
#11 | 2024-06-20METHODS FOR FORMING SEMICONDUCTOR STACKED STRUCTURES ON A SUBSTRATE AND RELATED SEMICONDUCTOR STRUCTURES
#12 | 2024-06-20METHODS FOR FORMING MULTILAYER STRUCTURES ON A SUBSTRATE AND RELATED MULTILAYER STRUCTURES
#13 | 2024-06-20MATERIAL LAYER DEPOSITION METHODS, MATERIAL LAYER STACKS, SEMICONDUCTOR PROCESSING SYSTEMS, AND RELATED COMPUTER PROGRAM PRODUCTS
#14 | 2024-02-29METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION
#15 | 2024-02-29CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING CHAMBER ARRANGEMENTS, AND RELATED MATERIAL LAYER DEPOSITION METHODS
#16 | 2022-09-22DUAL PYROMETER SYSTEMS FOR SUBSTRATE TEMPERATURE CONTROL DURING FILM DEPOSITION
#17 | 2022-09-22Methods of forming structures, semiconductor processing systems, and semiconductor device structures
#18 | 2022-09-08Film deposition systems and methods
#19 | 2021-11-18Methods for silicon germanium uniformity control using multiple precursors
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