Coimbatore
India
4
2023-11-09
The entities that hold a legal rights for patent applications filed by inventor RAJENDRAN Hari Prasath:
Hari Prasath RAJENDRAN from Coimbatore, IN has applied for patents for these inventions. The list has both pending applications and granted patents:
COMPLIANT INNER RING FOR A CHEMICAL MECHANICAL POLISHING SYSTEM
#2 | 2022-12-29Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool
#3 | 2022-03-24Electrostatic chuck having a heating and chucking capabilities
#4 | 2021-12-02HIGH TEMPERATURE AND VACUUM ISOLATION PROCESSING MINI-ENVIRONMENTS
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