Eindhoven
Netherlands
3
2025-07-24
The entities that hold a legal rights for patent applications filed by inventor ZENG Si-Han:
Si-Han ZENG from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUSES
#2 | 2022-06-02Method and system for determining overlay
#3 | 2021-12-23Method for determining root causes of events of a semiconductor manufacturing process and for monitoring a semiconductor manufacturing process
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