Suwon-si
South Korea
5
2026-05-28
The entities that hold a legal rights for patent applications filed by inventor PARK Jitae:
Jitae PARK from Suwon-si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
PLASMA MONITORING APPARATUS
#2 | 2026-04-02SUBSTRATE PROCESSING APPARATUS
#3 | 2025-03-13SEMICONDUCTOR PROCESS DEVICE AND METHOD OF MONITORING SEMICONDUCTOR PROCESS
#4 | 2024-08-15PLASMA MONITORING SYSTEM AND METHOD OF MONITORING PLASMA
#5 | 2022-03-03Method of monitoring a semiconductor device fabrication process and method of fabricating a semiconductor device using the same
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