Tokyo
Japan
55
2023-11-09
The entities that hold a legal rights for patent applications filed by inventor Maruyama Toru:
Toru Maruyama from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTRATE CLEANING APPARATUS
#2 | 2022-11-24Substrate processing apparatus, substrate processing system, and substrate processing method
#3 | 2022-09-29Pad-temperature regulating apparatus, and polishing apparatus
#4 | 2022-07-07Temperature regulating apparatus and polishing apparatus
#5 | 2022-03-10Pad-temperature regulating apparatus, method of regulating pad-temperature, polishing apparatus, and polishing system
#6 | 2022-03-10Method of cleaning an optical film-thickness measuring system
#7 | 2022-02-03Leak detection system and inspection method for the system
#8 | 2021-12-02Polishing apparatus having surface-property measuring device of polishing pad and polishing system
#9 | 2021-11-11Pad-temperature regulating apparatus, pad-temperature regulating method, and polishing apparatus
#10 | 2021-07-29SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPARATUS FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD USED IN POLISHING APPARATUS
#11 | 2021-06-10System for adjusting pad surface temperature and polishing apparatus
#12 | 2020-10-01Cleaning apparatus for heat exchanger and polishing apparatus
#13 | 2020-09-03CLEANING MEMBER ATTACHING PART, CLEANING MEMBER ASSEMBLY AND SUBSTRATE CLEANING APPARATUS
#14 | 2020-07-30Substrate processing apparatus, substrate processing system, and substrate processing method
#15 | 2020-06-18Substrate cleaning device
#16 | 2019-12-26METHOD OF CHECKING LEAKAGE OF FLUID AND POLISHING APPARATUS
#17 | 2019-06-06SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPARATUS FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD USED IN POLISHING APPARATUS
#18 | 2019-05-02HEAT EXCHANGER FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD, POLISHING APPARATUS HAVING SUCH HEAT EXCHANGER, POLISHING METHOD FOR SUBSTRATE USING SUCH HEAT EXCHANGER, AND COMPUTER-READABLE STORAGE MEDIUM STORING A PROGRAM FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD
#19 | 2019-04-25Polishing method and polishing apparatus
#20 | 2018-10-25Leak checking method, and computer-readable storage medium for performing the leak checking method
#21 | 2018-08-23Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program
#22 | 2018-08-09Method and apparatus for polishing a substrate
#23 | 2018-01-25Polishing method and polishing apparatus
#24 | 2018-01-04Head height adjustment device and substrate processing apparatus provided with head height adjustment device
#25 | 2017-12-21Polishing method and polishing apparatus
#26 | 2017-12-07SUBSTRATE PROCESSING APPARATUS
#27 | 2017-08-24Apparatus and method for regulating surface temperature of polishing pad
#28 | 2017-04-27Substrate processing apparatus and pipe cleaning method for substrate processing apparatus
#29 | 2017-03-30Pressure calibration jig and substrate processing apparatus
#30 | 2017-02-16Substrate processing apparatus, substrate processing system, and substrate processing method
#31 | 2016-10-27Substrate processing apparatus and method for detecting abnormality of substrate
#32 | 2016-09-15Substrate transfer hand
#33 | 2016-04-07Adjusting a substrate polishing condition
#34 | 2015-12-10Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit
#35 | 2015-08-20Method and apparatus for conditioning polishing pad
#36 | 2015-08-13Method and apparatus for polishing a substrate
#37 | 2015-08-13Pressure regulator and polishing apparatus having the pressure regulator
#38 | 2015-06-04Polishing apparatus
#39 | 2015-03-19Polishing method and polishing apparatus
#40 | 2015-02-19Monitoring method and cooling system
#41 | 2015-01-29Compressor and cooling system
#42 | 2014-12-11SUBSTRATE POLISHING APPARATUS, SUBSTRATE POLISHING METHOD, AND APPARATUS FOR REGULATING TEMPERATURE OF POLISHING SURFACE OF POLISHING PAD USED IN POLISHING APPARATUS
#43 | 2014-11-27Substrate processing apparatus
#44 | 2014-08-07Substrate cleaning apparatus and substrate cleaning method
#45 | 2014-05-08Adjusting a substrate polishing condition
#46 | 2014-03-27Pressure regulator, polishing apparatus having the pressure regulator, and polishing method
#47 | 2013-01-24Method and apparatus for polishing a substrate
#48 | 2012-09-27Oil separator
#49 | 2012-08-30Polishing apparatus having temperature regulator for polishing pad
#50 | 2011-06-30Substrate polishing apparatus, substrate polishing method, and apparatus for regulating temperature of polishing surface of polishing pad used in polishing apparatus
#51 | 2010-10-28OIL SEPARATOR AND COMPRESSOR FOR REGENERATIVE REFRIGERATOR
#52 | 2009-12-10Laminated glass with shade band
#53 | 2007-10-25Vehicle window glass
#54 | 2007-05-24Window glass, window glass electrode leading-out device, window glass conductivity-adding method, and a window glass electrode leading-out method
#55 | 2006-11-09Glass article and method for forming indication on glass article surface
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