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Inventor profile of:

Hiroki MURAKAMI

City:

Nirasaki

Country:

Japan

Published Applications:

25

Last publication date:

2023-05-11

Top Assignees for applications by Hiroki MURAKAMI

The entities that hold a legal rights for patent applications filed by inventor MURAKAMI Hiroki:

Recent patent applications by MURAKAMI Hiroki

Hiroki MURAKAMI from Nirasaki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-05-11
US20230146375A1
Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

 #2 | 2023-05-04
US20230135342A1
Electricity

Film forming method and film forming apparatus

 #3 | 2023-04-27
US20230128868A1
Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

 #4 | 2022-06-16
US20220189778A1
Electricity

Method for forming film

 #5 | 2022-05-19
US20220157616A1
Electricity

Substrate processing method and substrate processing system

 #6 | 2021-04-01
US20210098267A1
Electricity

Substrate processing method and substrate processing apparatus

 #7 | 2020-07-09
US20200219716A1
Electricity

Method of forming nitride film and apparatus for forming nitride film

 #8 | 2019-06-06
US20190172710A1
Electricity

Method of filling recess and processing apparatus

 #9 | 2019-03-28
US20190096750A1
Electricity

Selective film forming method and method of manufacturing semiconductor device

 #10 | 2018-10-04
US20180286691A1
Electricity

Etching method and etching apparatus

 #11 | 2018-10-04
US20180286667A1
Electricity

Selective growth method

 #12 | 2018-09-27
US20180277389A1
Electricity

Heating method, film forming method, semiconductor device manufacturing method, and film forming apparatus

 #13 | 2018-02-01
US20180033608A1
Electricity

Method and apparatus for forming nitride film

 #14 | 2017-09-28
US20170278705A1
Electricity

Nitride film forming method and storage medium

 #15 | 2017-09-28
US20170278697A1
Electricity

Nitride film forming method and storage medium

 #16 | 2016-03-10
US20160071728A1
Electricity

Film forming method and film forming apparatus

 #17 | 2015-09-17
US20150259796A1
Chemistry; metallurgy

Film forming method, film forming apparatus and storage medium

 #18 | 2015-07-23
US20150206795A1
Electricity

Amorphous silicon film formation method and amorphous silicon film formation apparatus

 #19 | 2014-07-31
US20140213067A1
Electricity

Film forming method

 #20 | 2014-07-17
US20140199853A1
Electricity

Method of forming silicon oxide film

 #21 | 2012-07-12
US20120178264A1
Chemistry; metallurgy

Method and apparatus for forming silicon nitride film

 #22 | 2011-12-22
US20110312192A1
Chemistry; metallurgy

Film formation method and film formation apparatus

 #23 | 2011-10-27
US20110263105A1
Electricity

Amorphous silicon film formation method and amorphous silicon film formation apparatus

 #24 | 2010-07-29
US20100189927A1
Chemistry; metallurgy

Film formation apparatus and method for using same

 #25 | 2010-04-01
US20100081094A1
Electricity

Mask pattern forming method, fine pattern forming method, and film deposition apparatus
InventorID:

5412317 ⎘