Milpitas, California
United States
5
2023-12-26
The entities that hold a legal rights for patent applications filed by inventor Paskover Yuri:
Yuri Paskover from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Systems and methods for metrology with layer-specific illumination spectra
#2 | 2023-10-05SYSTEM AND METHOD FOR ISOLATION OF SPECIFIC FOURIER PUPIL FREQUENCY IN OVERLAY METROLOGY
#3 | 2023-10-05SCANNING SCATTEROMETRY OVERLAY METROLOGY
#4 | 2023-05-04Moiré scatterometry overlay
#5 | 2022-06-16On-the-fly scatterometry overlay metrology target
5435694 ⎘