Michael Erath

City:

Dietenheim

Country:

Germany

Published Applications:

Last publication date:

2024-05-30

Top Assignees for applications by Michael Erath

The entities that hold a legal rights for patent applications filed by inventor Erath Michael:

Michael Erath from Dietenheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

A POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A DRIVING FORCE ATTENUATION METHOD, AND A DEVICE MANUFACTURING METHOD

Projection exposure apparatus for semiconductor lithography with a vibration damper and method for designing a vibration damper

Weight-force compensation device

Assembly in a microlithographic projection exposure apparatus

Optical arrangement, in particular lithography system

Optical arrangement, in particular lithography system, with a transport lock

Device for aligning a component

Arrangement for mounting an optical element

InventorID:

545666 ⎘