Xuemei Chen

City:

Austin, Texas

Country:

United States

Published Applications:

Last publication date:

2023-02-02

Top Assignees for applications by Xuemei Chen

The entities that hold a legal rights for patent applications filed by inventor Chen Xuemei:

Xuemei Chen from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:

System and method for focus control in extreme ultraviolet lithography systems using a focus-sensitive metrology target

System and method for focus control in extreme ultraviolet lithography systems using a focus-sensitive metrology target

InventorID:

5458091 ⎘