Miyagi
Japan
5
2025-10-16
The entities that hold a legal rights for patent applications filed by inventor WAKO Yusuke:
Yusuke WAKO from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
ETCHING METHOD
#2 | 2024-01-04SUBSTRATE PROCESSING METHOD, COMPONENT PROCESSING METHOD, AND SUBSTRATE PROCESSING APPARATUS
#3 | 2023-08-24ETCHING METHOD
#4 | 2022-12-08SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM
#5 | 2022-07-28Substrate processing method, component processing method, and substrate processing apparatus
5476629 ⎘