Yuri KIMURA

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2023-06-29

Top Assignees for applications by Yuri KIMURA

The entities that hold a legal rights for patent applications filed by inventor KIMURA Yuri:

TOKYO ELECTRON LIMITED 3 Tokyo, Japan

Recent patent applications by KIMURA Yuri

Yuri KIMURA from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-06-29

US20230206418A1

Physics

ETCHING PROCESSING SYSTEM, METHOD OF PREDICTING ETCHING QUALITY, AND NON-TRANSITORY STORAGE MEDIUM OF ETCHING QUALITY PREDICTION STORING A PROGRAM CAUSING A COMPUTER TO IMPLEMENT A PREDICTION

#2 | 2023-03-16

US20230078310A1

Electricity

METHOD OF DETECTING DEVIATION AMOUNT OF SUBSTRATE TRANSPORT POSITION AND SUBSTRATE PROCESSING APPARATUS

#3 | 2022-09-29

US20220310369A1

Electricity

Substrate processing apparatus and substrate transfer position adjustment method

InventorID:

5534104 ⎘