San Ramon, California
United States
14
2026-02-19
The entities that hold a legal rights for patent applications filed by inventor Chen Xiaolin C.:
Xiaolin C. Chen from San Ramon, US has applied for patents for these inventions. The list has both pending applications and granted patents:
SELECTIVE ETCHING OF SILICON-CONTAINING MATERIAL
#2 | 2026-02-19SELECTIVE ETCHING OF SILICON-AND-GERMANIUM-CONTAINING MATERIAL
#3 | 2025-12-25RESIDUE REMOVAL AFTER ETCH PROCESSES USING A BORON-CONTAINING ETCHANT
#4 | 2025-09-25SYSTEMS AND METHODS FOR SELECTIVE METAL-CONTAINING MATERIAL REMOVAL
#5 | 2025-09-18PRIME STEP FOR METAL ETCH IN HIGH ASPECT-RATIO FEATURES
#6 | 2025-06-05METAL OXIDE DIRECTIONAL REMOVAL
#7 | 2025-03-13SYSTEMS AND METHODS FOR SELECTIVE METAL-CONTAINING HARDMASK REMOVAL
#8 | 2024-08-01SYSTEMS AND METHODS FOR TITANIUM-CONTAINING FILM REMOVAL
#9 | 2023-11-30HIGHLY CONFORMAL METAL ETCH IN HIGH ASPECT RATIO SEMICONDUCTOR FEATURES
#10 | 2023-09-14Metal deposition and etch in high aspect-ratio features
#11 | 2023-01-19Metal oxide directional removal
#12 | 2023-01-12Selective removal of transition metal nitride materials
#13 | 2022-11-10Metal etch in high aspect-ratio features
#14 | 2022-10-27Selective removal of ruthenium-containing materials
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